Release tape is an unique tape that has three layers structure, including adhesive layer – base film and thermal release layer. These tapes behave like adhesive tape at room temperature but can be easily removed by heating at high temperature when we want to release this tape. Because these tapes are available in rolls for all automatic or manual wafer mounting systems, thermal release tape is widely applied in semiconductor package industry. In this paper, heat-resistance of thermal release tape were studied under some thermal conditions, such as (Y-30)°C/3hr-(Y-20)°C/3hr-(Y-10)°C/3hr and Y°C/3hr and we examine foaming phenomenon of tape. These results show that tape will lose fully foaming ability and become more difficultly to be released after long time heating on high temperature. Capable of releasing/collecting semiconductor wafers at any stage by constant support of the semiconductor wafer using a supporting wafer. Especially recommended for semiconductor wafer backgrind processing. The thermal release tape is a unique adhesive tape that adheres tightly at room temperature and can easily be peeled off just by heating. The tape contributes significantly to automation/laborsaving of various electronic component manufacturing processes.